Computational Lithography
- Brand: John Wiley & Sons Inc
Sold by:
Computational Lithography
- Brand: John Wiley & Sons Inc
Currently unavailable
14-Day Returns Policy
Sold by:
Currently unavailable
14-Day Returns Policy
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Description
Computational Lithography
This is the first book to address the optimization of resolution enhancement techniques in optical lithography. It provides an in-depth discussion of RET tools that use model-based mathematical optimization approaches.
- Brand: John Wiley & Sons Inc
- Category: Science, Medicine & Nature
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Format: Hardback
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Language: English
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Publication Date: 2025-02-10
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Publisher / Label: John Wiley & Sons Inc
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Author: Xu Ma
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Number of Pages: 256
- Fruugo ID: 434359682-911567026
- ISBN: 9780470596975
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